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      Example: Mass airflow sensors

Technology example

The major foundry business at MEAS Deutschland GmbH is today made with the production of heat-flow sensors for the automotiv industry. The sensor-chip contains metallic heaters and thermoresistors forming well defined heat flow measuring units. To minimize the disturbing heat-exchange with the sourrounding material, both elements must be placed on a very thin silicon-nitride membrane.


MEAS Deutschland GmbH does the complete manufacturing of heat-flow sensor wafers including the ISO/TS conform characterization, testing and documentation.

Our customers ust the chips for mass flow-control and gas detection in all kinds of automotive engines, i.e. diesel- and hydrogen-engines.
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certified in accordance with
DIN EN ISO 9001:2000
ISO/TS 16949

 
    letzte Aktualisierung: 30.01.2010